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000000452 080__ $$a546.284-31:621.3.049.77(043)
000000452 080__ $$a621.3.049.77:546.284-31(043)
000000452 100__ $$aCobianu, Cornel
000000452 245__ $$aStudiul fenomenelor electronice şi de structură îm bioxidul de siliciu depus din faza de vapori utilizat în circuite integrate pe scară foarte mare$$cCornel Cobianu
000000452 260__ $$aBucureşti$$bInstitutul Politehnic Bucureşti$$c1991
000000452 300__ $$a158 p.$$bfig.$$c30 cm
000000452 502__ $$aTeză de doctorat. Cond. şriinţ. : prof. dr. ing. Vasile M. Cătuneanu
000000452 504__ $$aConţine bibliogr.
000000452 650__ $$aBioxid de siliciu$$vTeză de doctorat$$xCircuite integrate
000000452 650__ $$aFizica filmelor subţiri$$vTeză de doctorat
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